Plasma Cleaners, Plasma Etchers, Plasma Ashers and Sputter Deposition (PVD) systems are provided by Glow Research.   Glow Research manufactures the new AutoGlow plasma cleaner/etcher, the OptiGlow plasma systems and the SputterGlow sputter deposition (PVD) systems. Glow Research also has taken over the parts and worldwide support for several older plasma systems from Nordson MARCH (Plasmod, Super Plasmod, PM-600, Jupiter RIE) and builds new plasma reactors for various requirements and sizes.  We understand that most labs and people that purchase plasma systems require a great deal of assistance before and after the sale.  We have the ability to run your samples, and assist with the installation of your system.  Glow Research will process FREE SAMPLES for Customers that may want to purchase our systems.

AutoGlow Plasma System

Plasma Cleaner.  Can be used at low power of 10 watts or up to 300 watts, 13.56 MHz solid state generator, automatic tuning, pressure read-out, nitrogen purge, soft venting, three gas inputs and is CE marked.  The AutoGlow comes with a 24 month warranty.  Perfect for treating PDMS, organic removal or photo-resist removal.

The AutoGlow plasma system is used in production factories as well as labs–designed to provide the medical, scientific, educational and microelectronics community with plasma technology at a moderate cost. Includes a 2 year  warranty.

Larger AutoGlow systems are available with anodized aluminum chambers to fit Customer’s requirements.  AutoGlow systems can process 200 mm (8″) wafers.

Find out more about AutoGlow

SputterGlow Sputter Deposition System

A perfect choice to deposit dielectrics or metals with up to three targets. Originally designed to deposit Si3N4anti-reflective coatings on solar cells as an alternative to using PECVD–because the SputterGlow process does not require dangerous gases such as SiH4 for nitride deposition.  The system has stepper robotics, heated stations, and is controlled with a lap-top computer.

The proprietary planar magnetron generates a plasma with low or high power depending on your need. The SputterGlow was designed to ensure process vacuum integrity and utilize an aluminum chamber (to keep cost down).

Find out more about SputterGlow

OptiGlow Plasma Systems 

Used for Plasma Surface Modification and Plasma Treatment, Surface Activation. Priced under $10,500 (USD), the sturdy, table-top OptiGlow plasma system is perfect for production or lab applications. Easy to use.  Display for chamber pressure and module status. 

The OptiGlow system is the first low cost plasma system that can be used for increasing the wettability and comfort of contact lenses and various materials. The OptiGlow plasma system is ideal for use prior to coating, laminating and deposition processes, and is highly effective at treating a wide range of substrates or material. Used in Bio MEMS and MicroFluidics.

The OptiGlow 75 plasma system is like the standard OptiGlow, but with with 75 watts of power and the option to use up to two input gases, such as oxygen or argon. 

The OptiGlow ACE is designed to perform Ashing, Cleaning or Etching at 13.56 MHz.  The OptiGlow ACE is designed for up to two gases inputs and can be use with CF4 type gases.  Anodized aluminum chamber and for either RIE or Plasma conditions.  Great for a long process and removing layers on packages or semiconductor chips.

OptiGlow ACE (Cleaning, Ashing, Etching)

Find out more about OptiGlow systems

Rebuilt Systems

Glow Research has taken over the world-wide responsibility for parts and service for several older units from Nordson MARCH (March Plasmod, March Super Plasmod, March PM-600 and March Jupiter RIE systems). We stay with our expertise and offer rebuilt March and Tegal plasma systems. Take a look at what rebuilt systems we have to offer.