AutoGlow Plasma System

Small table-top design will easily fit in your lab.

The AutoGlow plasma system is a tabletop plasma chemistry reactor designed to provide the medical, scientific, educational and microelectronics community with plasma technology at a moderate cost. The system is suitable for R&D centers, universities and laboratory facilities which will find the AutoGlow plasma system the perfect fit for their plasma needs.

The AutoGlow plasma system is the most efficient system of its kind on the market because of its variable 10-300 watt, 13.56 MHz solid state generator. The AutoGlow plasma system is also designed to efficiently breakdown gases introduced to the system creating reactive species that will quickly clean or modify the sample. Automatic tuning and a pressure readout are included.

A new and efficient updated design

Small plasma systems for use in labs and other electronics manufacturing were first introduced in the mid 1970s and have been used with little design change since that time.

Glow Research has taken the best designs of the old systems, and updated the AutoGlow plasma system with current technology, including our proprietary phase magnitude detector and SimpleMatch RF network that allows efficient plasma tuning and provides quick processing without the trouble of constantly adjusting to various sample loads. The AutoGlow plasma system has a 24 month warranty!

AutoTell Diagnostic Card: This card can be plugged into the back of the AutoGlow to test the functionality of various components in the system. This is a fantastic tool for helping Customers regardless of their location in the world—information from this card can be easily relayed by a picture to technical support at Glow Research.

AutoGlow Match Board: This proprietary solid state board is used in the RF match network and is one of two boards in the system. Provides for quick and accurate tuning, and keeps reflected power to a minimum. This same design is use in very expensive production plasma tools.

AutoGlow Control Board: This is the second of two boards in the AutoGlow system. The Control Board is mounted to the reverse side of the front panel of the AutoGlow. It is designed with plug-in compatibility, so it can be easily replaced. This type of advanced modularity is commonly only found in production semiconductor production equipment.