AutoGlow Features

The AutoGlow plasma system has solid state electronics, updated gas delivery options and technology that is expected by both users and safety personnel throughout the world. The chamber size is 144.27mm (5.68 in) in diameter by 186.94mm deep (7.36 in) and is made of high purity quartz. The system and chamber are designed to increase uniformity and repeatability when compared to other table-top plasma systems.

The AutoGlow plasma system was designed for either low power or high power operation with a variable 10-300 watts, 13.56 MHz solid state generator making the AutoGlow plasma system the most efficient system of its kind on the market.

  • Small, table-top system
  • Variable 10 to 300 Watts at 13.56 MHz for gentle or more aggressive processing
  • Chamber made of high purity quartz
  • Solid state electronics—no tubes
  • Proprietary solid state detector for quick tuning
  • Automatic tuning for efficient plasma processing
  • Pressure read out for easy processing
  • Timer
  • Displays Forward and reflected power and RF set point
  • AutoTell diagnostic card for improved uptime
  • Chamber gas distribution for improved uniformity
  • Soft vent to prevent pressure burst
  • Optional Gas Control Module with up to three gas inputs
  • Uniform plasma for fast and efficient results
  • Proprietary RF generator and match network for minimal reflected power regardless of the power setting
  • SimpleMatch matching network for fast tuning
  • UV protection built into the front view door
  • Fully characterized system for repeatable results
  • Easy to understand—easy to operate
  • All electronics are on two plug in boards for easy repair
  • Start-up support
  • Start-up video
  • Complete manual and documentation
  • 24 month warranty

Shown is the AutoTell Diagnostic card, final test document, hard copy manual and a sample tray. An Installation video, a start-up video and a soft copy of the manual are sent pror to shipment.