AutoGlow Features

The AutoGlow plasma system has solid state electronics, updated gas delivery options and technology that is expected by both users and safety personnel throughout the world. The larger chamber size can accommodate a 6″ substrate and is 160mm (ID) diameter x 186.94 mm (ID) deep and is made of high purity quartz. The system and chamber are designed to increase uniformity and repeatability when compared to other table-top plasma systems. 

The AutoGlow plasma system was designed for either low power or high power operation with a variable 10-300 watts, 13.56 MHz solid state generator making the AutoGlow plasma system the most efficient system of its kind on the market.  The operator can run a process at 10 watts or as high as 300 watts for more aggressive processing.  The power can be adjusted in 1 watt increments. 

  • Small, table-top system
  • Variable 10 to 300 Watts at 13.56 MHz for gentle or more aggressive processing
  • Chamber made of high purity quartz
  • Solid state electronics—no tubes
  • Proprietary solid state detector for quick tuning
  • Automatic tuning for efficient plasma processing
  • Pressure read out for easy processing
  • Timer
  • Displays Forward and reflected power and RF set point
  • AutoTell diagnostic card for improved uptime
  • Chamber gas distribution for improved uniformity
  • Soft vent to prevent pressure burst
  • Optional Gas Control Module with up to three gas inputs
  • Uniform plasma for fast and efficient results
  • Proprietary RF generator and match network for minimal reflected power regardless of the power setting
  • SimpleMatch matching network for fast tuning
  • UV protection built into the front view door
  • Fully characterized system for repeatable results
  • Easy to understand—easy to operate
  • All electronics are on two plug in boards for easy repair
  • Start-up support
  • Start-up video
  • Complete manual and documentation
  • 24 month warranty

The design of the AutoGlow starts with the sheet metal used on the system.  Sheet metal is treated and masked to ensure proper RF design.  
The metal cabinet is masked in such a way to increase the metal-to-metal contact…to eliminate RF leakage. This means that the AutoGlow will strike a plasma quickly, regardless of the sample load. Proper RF tuning starts with the cabinet design.
 The AutoGlow is modular. The RF generator can be easily removed from the back of the system. The Chamber can be easily removed. All of the system electronics are on one replaceable board (attached to the front display panel). The only connections required are for electrical, vacuum and gas (all shown). Simply plug in the AC plug, connect the vacuum pump and your gas…and you are ready to process your samples.

 The Diagnostic card will confirm that all modules are working correctly. 

 

 

 

 

 

The RF Match Network is extremely fast—the capacitors turn 360 degrees, which allows the AutoGlow to tune extremely fast regardless of the load inside of the processing chamber.

The top electrode is powered and the bottom electrode is grounded—which produces a chemical process.  The AutoGlow can run from as low as 10 watts for gentle processing, or as high as 300 watts for more aggressive processing.

All of the electronics are on one electronic board.  This board is mounted to the backside of the front control panel.  The Front panel assembly can be easily replaced.