Plasma Applications
OptiGlow Plasma System
Priced under $10,500 (USD), the sturdy, table-top OptiGlow plasma system is perfect for production or lab applications. Find out more.AutoGlow Plasma System
The AutoGlow plasma system is the most efficient tabletop plasma system of its kind on the market because of its variable 10-300 watt, 13.56 MHz solid state generator. Find out more.Testing and Samples
Glow Research will run samples on a contract basis or for clients interested in the eventual purchase of a new or rebuilt system. Contact us for more information.Contact Us
Address:
12014 S. 35th Ct.
Phoenix, Az. 85044
United StatesPhone:
480-621-8405Translator
Translator
Stripping of Photoresist
The AutoGlow plasma system can be used for stripping of photoresist. Most users use an oxygen plasma to remove photoresist from a variety of wafers types (silicon, GaAs, silicon carbide, silicon nitride substrates). The AutoGlow plasma system’s automated design will allow easy and unattended operation.
Low temperature ashing is an effective means of preparing samples for a wide variety of analytical methods. An oxygen plasma will gently oxidize organic material leaving inorganics behind. Samples such as plant or animal tissue can be ashed leaving the three dimensional structure intact for analysis microscopy. Ashing rates are about one gram per hour, so the AutoGlow plasma system auto-tune feature is well suited for unattended operation. The AutoGlow plasma system can be used for cleaning transmission cells, windows and microscope slides.