Rebuilt Systems
OptiGlow Plasma System
Priced under $10,500 (USD), the sturdy, table-top OptiGlow plasma system is perfect for production or lab applications. Find out more.AutoGlow Plasma System
The AutoGlow plasma system is the most efficient tabletop plasma system of its kind on the market because of its variable 10-300 watt, 13.56 MHz solid state generator. Find out more.Testing and Samples
Glow Research will run samples on a contract basis or for clients interested in the eventual purchase of a new or rebuilt system. Contact us for more information.Contact Us
Address:
12014 S. 35th Ct.
Phoenix, Az. 85044
United StatesPhone:
480-621-8405Translator
Translator
Rebuilt Systems
Glow Research specializes in Tegal, March and R&D plasma systems. Rebuilt Tegal 901e and 903e systems are usually in stock.
Glow Research has taken over the world wide parts and service support for several of the older plasma systems from March Plasma Systems, Inc. (March Plasmod, Super Plasmod, PM-600 and Jupiter RIE systems).
This agreement allows Glow Research the ability to offer warranties on our rebuilt March systems.
March Plasmod Plasma Cleaner
March Plasmod Plasma Cleaner 115 VAC, 100 Watt, 13.56 MHz RF generator, manual tuning, Pyrex chamber, one gas input. The inner chamber diameter is 4″ and the chamber depth is 6.5″. Fully rebuilt and tested. Sold with a 30 day guarantee. Gas Control Module and chamber pressure monitor are optional.
Tegal Plasmod (4.5″ outer chamber)
115 VAC, 13.56 MHz RF generator, manual tuning, Pyrex chamber, one gas input. Outer chamber diameter is 4.5″, the inner chamber diameter is 4.25″ and the chamber depth is 6.2″. Fully rebuilt and tested. Sold with a 30 day guarantee.
Tegal Plasmod (4″ outer chamber)
115 VAC, 13.56 MHz RF generator, manual tuning, Pyrex chamber, one gas input. Outer chamber diameter is 4″, the inner chamber diameter is 3.5″ and the chamber depth is 6.5″. Fully rebuilt and tested. Sold with a 30 day guarantee.
March Jupiter II RIE
AE 600 Watt RF Generator, Four Mass Flow Controllers, Automatic Tuning, Timer, End Point Detector, Baratron Pressure Control, End Point Control and microprocessor control. 4” or 6”.
Tegal 903e
Cassette-to-Cassette In-line Single Wafer Plasma Etcher. Capability to etch vias and contacts. For etching silicon dioxide, silicon nitrides, and polyamides. System is sold with consultation from on proper facilitation and operation. System is operational and can be demonstrated at our Customer Support Center in Mesa, Arizona. Various upgrades are available to fit your specific needs. [...]
Tegal 901e
Cassette-to-Cassette Polysilicon/Silicon Nitride Plasma Etcher. System is operational and can be demonstrated. Currently configured for 4 in (100mm) wafers. ENI 1000 Watt 13.56 MHz RF Generator. 20 Process recipe capability Process gases controlled by TYLAN MFC’s Non-friction spatula pick and place wafer transport. Leybold D65 oxygen service pump Tegal Closed loop temperature controller Chart recorder [...]
Tegal 421 Etcher
Can provide up to 100 degree C. heat—designed to be able to etch nitride or strip photoresist. Two gas inputs, upgraded solid state ENI ACG-5XL RF generator, 13.56Mhz., 500 watts. Upgraded with Raines/Theis auto tune and baratron pressure control. Upgraded solid state heater control. New DC power supply, new gas lines, chamber rebuilt with new [...]