Rebuilt Systems
OptiGlow Plasma System
Priced under $10,500 (USD), the sturdy, table-top OptiGlow plasma system is perfect for production or lab applications. Find out more.AutoGlow Plasma System
The AutoGlow plasma system is the most efficient tabletop plasma system of its kind on the market because of its variable 10-300 watt, 13.56 MHz solid state generator. Find out more.Testing and Samples
Glow Research will run samples on a contract basis or for clients interested in the eventual purchase of a new or rebuilt system. Contact us for more information.Contact Us
Address:
12014 S. 35th Ct.
Phoenix, Az. 85044
United StatesPhone:
480-621-8405Translator
Translator
Rebuilt Systems
Glow Research specializes in Tegal, March and R&D plasma systems. Rebuilt Tegal 901e and 903e systems are usually in stock.
Glow Research has taken over the world wide parts and service support for several of the older plasma systems from March Plasma Systems, Inc. (March Plasmod, Super Plasmod, PM-600 and Jupiter RIE systems).
This agreement allows Glow Research the ability to offer warranties on our rebuilt March systems.
Recent Tegal 901e Customer Comment:
“We purchased a Tegal 901e system from Glow Research. Feel free to mention us as a happy customer on your web site.”…….Eric Weis, PanJit Americas, Inc.
March Plasmod
March Plasmod with 150 Watt, 13.56 MHz Generator. Barrel type plasma system with a Pyrex 5.8” (dia) x 7” (deep) chamber. The Pyrex chamber door is mounted on the inside of the front door for easy access and processing. Has automatic tuning of the matching network for easy processing. Analog panel meters. 115V, 50/60 [...]
March AP-1000
Rebuilt March AP-1000, S/N P100199, Manufactured: March 2005 Advanced Energy ACG6B, 600 watt RF generator, 13.56 MHz., solid state 13.56 MHz power supply with automatic impedance matching 2 Mass Flow Controllers (Porter), 250 sccm and 500 sccm Light Tower Leybold Trivac pump model D65BCS, ready for Fomblin type oil Alcatel oil mist eliminator, OME 40S [...]
MARCH CS-1701
MARCH CS-1701 RIE System The MARCH CS-1701 system is still supported by Nordson MARCH and Glow Research has rebuilt this system to the highest standards. After sale support can be contracted with Nordson MARCH world-wide. Installation assistance is supported by Glow Research. This newer style MARCH CS-1701 has updated gas manifold with a lid lift [...]
Plasma Cleaner
AutoGlow plasma cleaner and asher. 10 to 300 Watt, auto-tune, diagnostics, 160 mm dia. quartz chamber, pressure display, timer shut off, CE marked, capacitively coupled, 24 month warranty. Great for plasma cleaning, ashing or removing organics.
March Jupiter
March Jupiter II RIE. AE 600 Watt RF Generator, Four Mass Flow Controllers, Automatic Tuning, Timer, End Point Detector, Baratron Pressure Control, End Point Control and microprocessor control. 4” or 6”. Full support, rebuilt, 30 day warranty. Ready to etch!
Tegal 903e
Cassette-to-Cassette In-line Single Wafer Plasma Etcher. Capability to etch vias and contacts. For etching silicon dioxide, silicon nitrides, and polyamides. System is sold with consultation from on proper facilitation and operation. System is operational and can be demonstrated at our Customer Support Center in Mesa, Arizona. Various upgrades are available to fit your specific needs. [...]
Tegal 901e
Cassette-to-Cassette Polysilicon/Silicon Nitride Plasma Etcher. System is operational and can be demonstrated. Currently configured for 4 in (100mm) wafers. ENI 1000 Watt 13.56 MHz RF Generator. 20 Process recipe capability Process gases controlled by TYLAN MFC’s Non-friction spatula pick and place wafer transport. Leybold D65 oxygen service pump Tegal Closed loop temperature controller Chart recorder [...]