Lab Plasma System

March Plasmod

Rebuilt Plasmod with Optional Gas Control Module

 

March Plasmod  115 VAC, 13.56 MHz RF generator, manual tuning, Quartz inner chamber and outer chamber..  Manual Tuning.  Outer chamber diameter is 4.5″, the inner chamber diameter is 4.25″ and the chamber depth is 6.2″.  Fully rebuilt and tested.  Sold with a 30 day guarantee.  Price is $4,000.   It is suggested that you have some way of metering gas into the chamber—via a flowmeter or a needle valve.  You should also have a way to monitor chamber pressure. 

 The system is pictured with a March Gas Control Module (GCM) that can meter up to 3 gases and has a pressure gauge that can be connected to the Plasmod chamber to monitor pressure.  The GCM is priced at $2,500.