March AP-1000

 Rebuilt March AP-1000, S/N P100199,

• Manufactured:  March 2005
• Advanced Energy ACG6B, 600 watt RF generator, 13.56 MHz., solid state
• 13.56 MHz power supply with automatic impedance matching
• 2 Mass Flow Controllers (Porter), 250 sccm and 500 sccm
• Light Tower
• Leybold Trivac pump model D65BCS, ready for Fomblin type oil
• Alcatel oil mist eliminator, OME 40S
• Removable and adjustable shelves
• 11-gauge stainless steel chamber with aluminum fixtures
• Internal chamber is: 18” (457 mm) wide x 18” (457 mm) high x 24” (610 mm) deep
• PLC controller with touch screen
• SEMI S2-S8 Compliant, CE Compliant

March AP-1000 400 Watt Plasma

Facilities Information:

• Power: 200-240 VAC, 3 phase, 25A
• Purge Gas: 0.25 inch Swagelok compression fitting for  50-80 psi Nitrogen or clean dry air (CDA)

Process Gas: 0.25 inch Swagelok compression fitting for 10-15 psi

March AP-1000 Display