Tegal 901e

Cassette-to-Cassette Polysilicon/Silicon Nitride Plasma Etcher. System is operational and can be demonstrated.

• Currently configured for 4 in (100mm) wafers.
• ENI 1000 Watt 13.56 MHz RF Generator.
• 20 Process recipe capability Process gases controlled by TYLAN MFC’s Non-friction spatula pick and place wafer transport.
• Leybold D65 oxygen service pump
• Tegal Closed loop temperature controller
• Chart recorder for endpoint trace monitoring
• DEC Monitor and keyboard
• Manuals included

(sale pending)