SputterGlow Features

• Reactive Sputter Deposition of Si₃N₄ or Other Films
• Eliminates need for Silane Gas
• Easy to Facilitate in a Lab, No Hazardous Gases Needed
• Up to Three Targets
• Deposit Dielectrics or Metals
• 200 mm Wafers (or smaller) or 156 mm x 156 mm Solar Cells
• Heating Options (up to 400 Degrees C)
• 1200 Watt, 13.56 MHz RF Generator
• Automatic Tuning
• Turbo and Backing Pump
• Water Cooled Magnetron Sputtering
• Stepper Controlled Substrate Handling
• Computer or Manual Control of Gauges
• MFC control of gases
• LED Diagnostics

Options

• Substrate Bias
• RGA
• Recirculating Target Cooling
• Viewport Windows

All SputterGlow systems comes with a 12 month warranty, owner’s manual, video on proper set up of the system and operation. Glow Research will also provide on-site field service support for the start up of the system.

For more information please call Glow Research USA 480-621-8405 or Email us.